Table I-17 to Subpart I of Part 98—Expected and Possible By-Products for Electronics Manufacturing

For each stack system for which you use the “stack test method” to calculate annual emissions, you must measure the following:	If emissions are detected intermittently, use the following procedures:	If emissions are not detected, use the following procedures:	Expected By-products: CF4 C2F6 CHF3 CH2F2 CH3F	Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected	Use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” in Equation I-18.	Possible By-products: C3F8 C4F6 c-C4F8 C5F8	Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected	Assume zero emissions for that fluorinated GHG for the tested stack system.

[78 FR 68234, Nov. 13, 2013]