1. Regulations
  2. title 40
  3. chapter I-i22
  4. part 98
  5. subpart I
  6. appendix-i 15

- Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Manufacturing type/process type/gas Default DRE
(%) 		MEMS, LCDs, and PV Manufacturing60 Semiconductor Manufacturing: CF487 CH3F98 CHF397 CH2F298 C4F893 C4F8O93 C5F897 C4F695 C3F898 C2HF597 C2F698 SF695 NF396 All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing60 N2O Processes CVD and all other N2O-using processes60
[89 FR 31922, Apr. 25, 2024]

AUTHORITY: 42 U.S.C. 7401-7671q.

SOURCE: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.