1. Regulations
  2. title 40
  3. chapter I-i22
  4. part 98
  5. subpart I
  6. appendix-i 14

- Table I-15 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS Manufacturing for Use With the Stack Test Method

[78 FR 68233, Nov. 13, 2013]

AUTHORITY: 42 U.S.C. 7401-7671q.

SOURCE: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.