- Table I-11 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method
Table I-11 to Subpart I of Part 98—Default Emission Factors (1-U
[150 mm and 200 mm Wafers]
| All processes | Process gas i | CF | C | CHF | CH | C | CH | C | C | NF | NF Remote | SF | C | C | C | 1-U | 0.79 | 0.55 | 0.51 | 0.13 | 0.064 | 0.70 | 0.40 | 0.12 | 0.18 | 0.028 | 0.58 | 0.083 | 0.072 | 0.14 | BCF | NA | 0.19 | 0.085 | 0.079 | 0.077 | NA | 0.20 | 0.11 | 0.11 | 0.015 | 0.13 | 0.095 | NA | 0.13 | BC | 0.027 | NA | 0.035 | 0.025 | 0.024 | 0.0034 | NA | 0.019 | 0.0059 | NA | 0.10 | 0.073 | 0.014 | 0.045 | BC | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | BC | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | BC | 0.00077 | NA | 0.0012 | NA | NA | NA | NA | 0.0043 | NA | NA | NA | NA | NA | NA | BCHF | 0.060 | 0.0020 | NA | 0.049 | NA | NA | NA | 0.020 | NA | NA | 0.0011 | 0.066 | 0.0039 | NA | BF | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.50 | NA | NA | NA | NA |
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