- Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Product type Emission factors EFiCF4C2F6CHF3c-C4F8C3F8NF3SF6N2O Semiconductors (kg/m 2)0.91.00.04NA0.050.040.20NA LCD (g/m 2)0.65NA0.00240.00NA1.294.1417.06 MEMS (kg/m 2)0.015NANA0.076NANA1.86NA

Notes: NA denotes not applicable based on currently available information.

[89 FR 31919, Apr. 25, 2024]